Long-travel, nm-accurate stages [Archive] - MICROmanufacturing

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Don Nelson
09-22-2009, 09:57 AM
Aerotech (http://www.aerotech.com) offers a series of high-accuracy, long-travel, direct-drive linear stages designed to provide “outstanding performance” when incorporated into alignment, inspection, positioning and measurement stations.

The low-profile ANT130-L stage employs a center-driven, noncogging, noncontact linear motor and encoder as the driving element. The direct-drive motor eliminates the backlash, windup and “stiction” normally associated with lead- and ball-screw drives, according to Aerotech.

The compact linear motor drives the ANT130-L to a peak unloaded acceleration of 1g and a maximum velocity of 350 mm/s. Resolution is 1nm; repeatability, 50nm, accuracy, 250nm; and in-position stability, 3nm.

Aerotech offers eight models of the ANT130, with travels ranging from 35mm to 160mm. Options include precision orthogonality alignment to 5 arc seconds, as well as vertical axis solutions.

For further information, contact Steve McLane at (412) 967-6854 or, via e-mail, at smclane@aerotech.com. Click here to download the ANT130-L data sheet. (http://www.aerotech.com/products/NANO/ant130l.html)

http://micromanufacturing.com/images/products/aerotechNMT-lg.jpg
Aerotech’s ANT130-L stage offers 1nm resolution.